Nanomechanical mass flow meter and controller device, method, and associated uses thereof. <\/p>\n\n\n\n
EP4336151B1<\/p>\n\n\n\n
Inventors:<\/p>\n\n\n\n
<\/p>\n\n\n\n <\/p>\n","protected":false},"excerpt":{"rendered":" Nanomechanical mass flow meter and controller device, method, and associated uses thereof. 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Montserrat Calleja G\u00f3mez<\/a>
\u00c1lvaro SAN PAULO HERNANDO<\/a>
Priscila KOSAKA MONTEIRO<\/a>
Francisco Javier Tamayo De Miguel<\/a>
Javier Enrique ESCOBAR ALC\u00d3N<\/a>
Juan MOLINA FERN\u00c1NDEZ<\/a>
Eduardo Gil Santos<\/a>
\u00d3scar MALVAR VIDAL<\/a>
Jos\u00e9 Jaime RUZ MART\u00cdNEZ<\/a><\/p>\n\n\n\n<\/h4>\n\n\n\n