Nanomechanical mass flow meter and controller device, method, and associated uses thereof.
EP4336151B1
Inventors:
Montserrat Calleja Gómez
Álvaro SAN PAULO HERNANDO
Priscila KOSAKA MONTEIRO
Francisco Javier Tamayo De Miguel
Javier Enrique ESCOBAR ALCÓN
Juan MOLINA FERNÁNDEZ
Eduardo Gil Santos
Óscar MALVAR VIDAL
José Jaime RUZ MARTÍNEZ